Profilometer Dektak XT Advanced System

Advanced System (with 3D mapping and stitching) allows measurements of small height differences via scanning of a sample below a needle with a diamant tip (stylus) as line scans.

Device Specifications

Vertical range 6.5 µm / 65.5 µm / 524 µm / 1 mm
Vertical resolution 1 Å @ 6,.5 µm vertical range
Scan length 55 mm (200 mm with stitching)
Horizontal resolution 120.000 points
Stage diameter 6" (15.2 cm)
Stylus force 1-15 mg
Stylus radius 2.5 µm, 5 µm, 12.5 µm, 25 µm
Data transfer USB