HREM

Philips XL30 FEG

High-resolution scanning electron microscope (HR-SEM) with EDX (energy dispersive X-ray spectroscopy), EDAX Genesis and Electron Backscatter Diffraction (EBSD), EDAX.

Device Specifications

Detectors	Se and BSE
Resolution (SE)	up to 2 nm
EDX system	EDAX Genesis with liquid nitrogen cooled traditional Si(Li)-type detector, energy resolution(~136eV) Electron Backscatter Diffraction (EBSD) system