Spin Coater
Equipment:SPIN150-v3, SPS Semiconductor Production Systems
Characteristics:
Substrate size: up to 150 mm or 6 inch in diameter, 101,6 x 101,6 mm (4“ x 4”) in square
max. Speed: 10000 rpm, for 1000 sec. up to 99 Steps
FG Disperse Feststoffe
Automated coating of many substrates with viscous polymeric precursors.
Equipment:SPIN150-v3, SPS Semiconductor Production Systems
Characteristics:
Substrate size: up to 150 mm or 6 inch in diameter, 101,6 x 101,6 mm (4“ x 4”) in square
max. Speed: 10000 rpm, for 1000 sec. up to 99 Steps