Plasma Immersion

Placing a sample inside of a plasma and accelerating its ions towards the sample via a negative high voltage is a simple method to perform ion implantation into the surface of a sample. Thus even three dimensional samples such as gear wheels or tubes are treated homogeneously without the need of sample manipulation.

Principle

The plasma can be generated by a separate plasma source (e.g. microwave or an antenna with RF) or simply by the applied high voltage.

Using a specially shaped sample holder, treatment times can be reduced considerably [34].

The implanted elements penetrate the surface up to a few ten nm and change its properties, e.g. the hardness, the friction coefficient or the corrosion properties [12, 23] of the substrate.

Depending on the plasma gas and the substrate chemical bondings might be formed [2, 4, 6], e.g. carbides or nitrides when using carbon or nitrogen, respectively. Carbon implantation with subsequent heating can be used to prepare anatase within a titanium surface [29].

SIMS depth profile of carbon implanted into Si with different treatment times.

XPS depth profile of carbon implanted into Ti.

DLC films

The same setup can also be used to prepare films. If hydrocarbon gases are used a diamond-like carbon (DLC) film is generated [1]. The properties of the DLC films, e.g. its friction coefficient, depend on the C:H ratio that can be influenced by the choice of plasma gas and the deposition parameters [3, 8, 11, 20, 21]. For special purposes the addition of another element like Si [10, 14, 30], F [15], I [36, 37] or Ag [19, 22, 26] is favorable. This will provide an improved heat resistivity, hydrophobicity or an antibacterial effect, respectively.

Titanium containing DLC films can be converted into anatase layers by heating in air [35].

The adhesion of the films on the substrate is sometimes problematic and can be enhanced by using an interlayer, e.g. a gradient layer prepared by implantation [24] or a metallic layer prepared by sputtering. The adhesion of DLC films is very low on copper substrates. There is an additional problem of a lateral inhomogeneity of the implanted species [5, 7] due to the dependence of the sputtering yield on the crystal orientation [13]. Pre-implantation of oxygen increases the adhesion of DLC films on copper considerably [38].

There are two vacuum chambers for the preparation of samples, one with the possibility to use magnetron sputtering in combination.

46	Diamond-Like Carbon Films with Low Internal Stress by a Simple Bilayer Approach K. Baba, R. Hatada, S. Flege, W. Ensinger Coatings 10, 696, 2020 DOI: 10.3390/coatings10070696
45	The Influence of Preparation Conditions on the Structural Properties and Hardness of Diamond-Like Carbon Films, Prepared by Plasma Source Ion Implantation R. Hatada, S. Flege, M. N. Ashraf, A. Timmermann, C. Schmid, W. Ensinger Coatings 10, 360, 2020 DOI: 10.3390/coatings10040360
44	Deposition of diamond-like carbon films on insulating substrates by plasma source ion implantation R. Hatada, S. Flege, W. Ensinger, K. Baba Surface and Coatings Technology 385, 125426, 2020 DOI: 10.1016/j.surfcoat.2020.125426
43	Preparation of Aniline-Based Nitrogen-Containing Diamond-Like Carbon Films with Low Electrical Resistivity R. Hatada, S. Flege, W. Ensinger, S. Hesse, S. Tanabe, Y. Nishimura, K. Baba Coatings 10, 54, 2020 DOI: 10.3390/coatings10010054
42	Electrical Transport Properties of Ni-doped Diamond-like Carbon Films at and above Room Temperature S. Saha, A. K. Das, R. Hatada, W. Ensinger, S. Flege, K. Baba, A. K. Meikap Journal of Applied Physics 126, 154104, 2019 DOI: 10.1063/1.5118871
41	Surface Structuring of Diamond-like Carbon Films by Chemical Etching of Zinc Inclusions R. Hatada, S. Flege, B. Rimmler, C Dietz, W. Ensinger, K. Baba Coatings 9, 125, 2019 DOI: 10.3390/coatings9020125
40	Dielectric constant, AC conductivity and impedance spectroscopy of zinc-containing diamond-like carbon film UV photodetector A.K. Das, R. Hatada, W. Ensinger, S. Flege, K. Baba, A.K. Meikap Journal of Alloys and Compounds 758, 194-205, 2018 DOI: 10.1016/j.jallcom.2018.05.121
39	Tightly adhering diamond-like carbon films on copper substrates by oxygen pre-implantation S. Flege, R. Hatada, T. Vogel, E. Bruder, M. Major, W. Ensinger, K. Baba Surface & Coatings Technology 335, 134-139, 2018 DOI: 10.1016/j.surfcoat.2017.12.029
38	Preparation of iodine containing diamond-like carbon films by trifluoroiodomethane T.Inoi, K.Baba, S. Flege, R. Hatada, W. Ensinger Materials Letters 215, 68-70, 2018 DOI: 10.1016/j.matlet.2017.12.061
37	Properties of iodine containing diamond-like carbon films prepared by plasma source ion implantation T.Inoi, K.Baba, S. Flege, R. Hatada, W. Ensinger Diamond and Related Materials 81, 108-112, 2018 DOI: 10.1016/j.diamond.2017.11.013
36	Preparation of anatase films from titanium containing diamond-like carbon films R. Hatada, S. Flege, W. Ensinger, K. Baba Materials Letters 213, 148-150, 2018 DOI: 10.1016/j.matlet.2017.11.034
35	Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition S. Flege, R. Hatada, A. Derepa, C. Dietz, W. Ensinger, K. Baba Review of Scientific Instruments 88, 096106, 2017 DOI: 10.1063/1.4995080
34	Nanoparticles as a Metal Source in Plasma Processes S. Flege, R. Hatada, G. Jantsen, T. Walbert, W. Ensinger, K. Baba, T. Morimura, F. Muench Transactions of the Materials Research Society of Japan 42, 31-36, 2017 DOI: 10.14723/tmrsj.42.31
33	Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation R. Hatada, S. Flege, B. Rimmler, W. Ensinger, K. Baba Transactions of the Materials Research Society of Japan 42, 37-40, 2017 DOI: 10.14723/tmrsj.42.37
32	Preparation of Metal-Containing Diamond-like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties S. Flege, R. Hatada, A. Hanauer, W. Ensinger, T. Morimura, K. Baba Advances in Materials Science and Engineering 2017, 9082164, 2017 DOI: 10.1155/2017/9082164
31	Long-term thermal stability of Si-containing diamond-like carbon films prepared by plasma source ion implantation R. Hatada, K. Baba, S. Flege, W. Ensinger Surface and Coatings Technology 305, 93-98, 2016 DOI: 10.1016/j.surfcoat.2016.08.011
30	Preparation of anatase surface layers via carbon implantation into titanium K. Baba, R. Hatada, S. Flege, W. Ensinger Materials Letters 168, 196-199, 2016 DOI: 10.1016/j.matlet.2016.01.086
29	Use of a nanostructured surface coating to achieve higher sputter rates S. Flege, R. Hatada, T. Kaiser, F. Muench, G. Cherkashinin, A. Schwöbel, W. Ensinger, K. Baba Materials Letters 164, 532-534, 2016 DOI: 10.1016/j.matlet.2015.11.059
28	Modification of diamond-like carbon films by nitrogen incorporation via plasma immersion ion implantation S. Flege, R. Hatada, M. Hoefling, A. Hanauer, A. Abel, K. Baba, W. Ensinger Nuclear Instruments and Methods in Physics Research B 365, Part A, 357-361, 2015 DOI: 10.1016/j.nimb.2015.07.084
27	Preparation of Ag-Containing Diamond-like Carbon Films on the Interior Surface of Tubes by a Combined Method of Plasma Source Ion Implantation and DC Sputtering R. Hatada, S. Flege, A. Bobrich, W. Ensinger, C. Dietz, K. Baba, T. Sawase, T. Watamoto, T. Matsutani Applied Surface Science 310, 257-261, 2014 DOI: 10.1016/j.apsusc.2014.03.071
26	DLC coating of interior surfaces of steel tubes by low energy plasma source ion implantation and deposition K. Baba, R. Hatada, S. Flege, W. Ensinger Applied Surface Science 310, 262-265, 2014 DOI: 10.1016/j.apsusc.2014.03.064
25	Improved adhesion of DLC films on copper substrates by preimplantation S. Flege, R. Hatada, W. Ensinger, K. Baba Surface and Coatings Technology 256, 37-40, 2014 DOI: 10.1016/j.surfcoat.2013.12.020
24	Surface modification and corrosion properties of implanted and DLC coated stainless steel by plasma based ion implantation and deposition R. Hatada, S. Flege, A. Bobrich, W. Ensinger, K. Baba Surface and Coatings Technology 256, 23-29, 2014 DOI: 10.1016/j.surfcoat.2013.11.051
23	Preparation and antibacterial properties of Ag-containing diamond-like carbon films prepared by a combination of magnetron sputtering and plasma source ion implantation K. Baba, R. Hatada, S. Flege, W. Ensinger, Y. Shibata, J. Nakashima, T. Sawase, T. Morimura Vacuum 89, 179-184, 2013 DOI: 10.1016/j.vacuum.2012.04.015
22	Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge R. Hatada, K. Baba, S. Flege, S. Nakao, W. Ensinger Transactions of the Materials Research Society of Japan 37, 227-232, 2012 DOI: 10.14723/tmrsj.37.227
21	Properties of Hydrogenated DLC Films as Prepared by a Combined Method of Plasma Source Ion Implantation and Unbalanced Magnetron Sputtering S. Flege, R. Hatada, W. Ensinger, K. Baba Journal of Materials Research 27,845-849, 2012 DOI: 10.1557/jmr.2011.341
20	Preparation and properties of Ag containing diamond-like carbon films by magnetron plasma source ion implantation K. Baba, R. Hatada, S. Flege, W. Ensinger Advances in Materials Science and Engineering 2012, 536853, 2012 DOI: 10.1155/2012/536853
19	Deposition of Diamond-like Carbon Films on Inner Wall Surfaces of Millimeter Size Diameter Steel Tubes by Plasma Source Ion Implantation K. Baba, R. Hatada, W. Ensinger, S. Flege IEEE Transactions on Plasma Science 39, 3140-3143, 2011 DOI: 10.1109/TPS.2011.2168829
18	Comparison of the Surface Modification of Tungsten and Gold by Methane Plasma Source Ion Implantation R. Hatada, S. Flege, W. Ensinger, K. Baba IEEE Transactions on Plasma Science 39, 3080-3084, 2011 DOI: 10.1109/TPS.2011.2160462
17	Methane Plasma-Based Ion Implantation of Metallic and Galvanically Oxidized Tantalum S. Flege, R. Hatada, K. Baba, W. Ensinger Surface Coatings and Technology 206, 951-954, 2011 DOI: 10.1016/j.surfcoat.2011.03.135
16	Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation S. Flege, R. Hatada, K. Baba, W. Ensinger Surface Coatings and Technology 206, 963-966, 2011 DOI: 10.1016/j.surfcoat.2011.03.100
15	Corrigendum to „Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation“ S. Flege, R. Hatada, K. Baba, W. Ensinger Surface and Coatings Technology 245, 167, 2014 DOI: 10.1016/j.surfcoat.2014.02.054
14	Temperature dependent properties of silicon containing diamond-like carbon films prepared by plasma source ion implantation R. Hatada, S. Flege, K. Baba, W. Ensinger, H.-J. Kleebe, I. Sethmann, S. Lauterbach Journal of Applied Physics 107, 083307, 2010 DOI: 10.1063/1.3394002
13	Influence of sputter rate and crystal orientation on the distribution of carbon in polycrystalline copper surfaces treated by plasma immersion ion implantation S. Flege, G. Kraft, E. Bruder, K. Baba, R. Hatada, W. Ensinger Journal of Applied Physics 106, 023302, 2009 DOI: 10.1063/1.3176488
12	Corrosion Resistance of Magnesium Treated by Hydrocarbon Plasma Immersion Ion Implantation M. Yekehtaz, K. Baba, R. Hatada, S. Flege, F. Sittner, W. Ensinger Nuclear Instruments and Methods in Physics Research Section B 267, 1666-1669, 2009 DOI: 10.1016/j.nimb.2009.01.099
11	Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation W. Ensinger Surface and Coatings Technology 203, 2721-2726, 2009 DOI: 10.1016/j.surfcoat.2009.02.101
10	Deposition of silicon containing diamond-like carbon films by plasma enhanced chemical vapour deposition K. Baba, R. Hatada, S. Flege, W. Ensinger Surface and Coatings Technology 203, 2747-2750, 2009 DOI: 10.1016/j.surfcoat.2009.02.117
9	Plasma-based carbon ion implantation of aluminium at different process times in a pulse-ignited methane plasma K. Baba, R. Hatada, S. Flege, G. Kraft, W. Ensinger Surface and Coatings Technology 203, 2617-2619, 2009 DOI: 10.1016/j.surfcoat.2009.02.077
8	Mechanical and electrical properties of diamond-like carbon films deposited by plasma source ion implantation K. Baba, R. Hatada, S. Flege, W. Ensinger Nuclear Instruments and Methods in Physics Research Section B 267, 1688-1691, 2009 DOI: 10.1016/j.nimb.2009.01.105
7	Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation S. Flege, G. Kraft, K. Baba, R. Hatada, W. Ensinger Nuclear Instruments and Methods in Physics Research Section B 267, 1531-1535, 2009 DOI: 10.1016/j.nimb.2009.01.126
6	Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation W. Ensinger Chapter 5 in: R. Wei (Ed.), Plasma Surface Engineering Research and its Practical Applications, Research Signpost, 2008 Book description
5	Comparison of surface layers on copper, titanium and tantalum created by methane plasma-based ion implantation G. Kraft, S. Flege, K. Baba, R. Hatada, W. Ensinger physica status solidi a 205, 985-988, 2008 DOI: 10.1002/pssa.200778330
4	Silicon carbide and boron carbide thin films formed by plasma immersion ion implantation of hydrocarbon gases W. Ensinger, G. Kraft, F. Sittner, K. Volz, K. Baba, R. Hatada Surface and Coatings Technology, 201, 8366-8369, 2007 DOI: 10.1016/j.surfcoat.2006.03.057
3	Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures W. Ensinger, K. Volz, K. Baba, R. Hatada Nuclear Instruments and Methods in Physics Research Section B 257, 692-695, 2007 DOI: 10.1016/j.nimb.2007.01.073
2	Formation of thin carbide films of titanium and tantalum by methane plasma immersion ion implantation K. Baba, R. Hatada, S. Flege, G. Kraft, W. Ensinger Nuclear Instruments and Methods in Physics Research Section B 257, 746-749, 2007 DOI: 10.1016/j.nimb.2007.01.076
1	Formation of diamond-like carbon films by plasma-based ion implantation and their characterization W. Ensinger New Diamond and Frontier Carbon Technology 16, 1-32, 2006 Paper on external server (opens in new tab) Note that the last page is missing in that pdf. Here (opens in new tab) is page 32.

Principle

DLC films

Publications