Topochemische Analytik

Topochemical analysis SIMS

Secondary ion mass spectrometer: Cameca ims5f

Charged atomic and molecular species are ejected from the uppermost layers of a surface under ion bombardment. These secondary ions can be mass separated (via sector fields) and detected.

  • Primary ions: Oxygen, argon or cesium
  • Primary energy: 1-17 keV (also depending on ion source and polarities)
  • Lateral resolution: down to ~1 µm
  • Depth resolution: some nm
  • Detection limit: down to ppb (depending on element and measurement conditions)
  • Sample size: 1 in. (2.5 cm) diameter, 1 cm height
  • Measurement area: up to 500x500 µm²
  • Detectable elements: all (starting from H)
  • Mass resolution: up to 25000