DAISY-MAT

Plasma in einer Vakuumkammer

DAISY-MAT

DArmstadt's Integated SYstem for MATerial Science

DAISY-MAT: Layout
DAISY-MAT: Layout

DAISY-MAT: Specifications

Applications:

Qualitative and quantitative analysis of surfaces and interfaces

Sensitivity: structural, electronic and chemical information on surfaces and interfaces, inner boundaries

Electron Spectrometer:

Physical Electronic 5700

  • Monochromatic and laterally resolving X-ray photoelectron spectroscopy (XPS, ESCA)
  • UV photoelectron spectroscopy (UPS)
  • low-energy ion scattering spectroscopy (LEISS)

Analytical characteristics:

  • Information depth 0.2 – 2 nm
  • spectral resolution < 0.4 eV (XPS)
  • lateral resolution 30 µm

Distribution chamber

Preparation units

  • MBE chamber with heatable sample stage and different evapouration sources
  • deposition chamber for magnetron sputtering